DNS Chemical Cabinet Flow Alarm:

The shot pump inside the DNS Chemical cabinet can fail with no alarm resulting wafer scrap.

• PTFE flow sensor monitors the flow of Chemicals (H2O2) after the shot pump.

• PLC based controls integrated into the chemical cabinet.

• Adds a pump flow alarm indicator to the touch panel.

• Adjustable setpoint alarm, stops the DNS tool when the correct amount of chemical is not added to the tank.

• Reduces wafer scrap due to inadequate chemical mix.