DNS Chemical Cabinet Flow Alarm:
The shot pump inside the DNS Chemical cabinet can fail with no alarm resulting wafer scrap.
• PTFE flow sensor monitors the flow of Chemicals (H2O2) after the shot pump.
• PLC based controls integrated into the chemical cabinet.
• Adds a pump flow alarm indicator to the touch panel.
• Adjustable setpoint alarm, stops the DNS tool when the correct amount of chemical is not added to the tank.
• Reduces wafer scrap due to inadequate chemical mix.